SK Hynix factory fire causes fluorine leak; 11 employees hospitalized

An incident at SK Hynix's M15 factory in Cheongju, South Korea, on June 1 resulted in 11 employees being taken to the hospital following a fire and a subsequent chemical leak. The fire broke out in a gas room located between the M15 and M15X 공장 (factories).

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At the time, about five people showed symptoms such as stinging eyes, and after treatment, all received 'no issues' clearance. They are currently resting at the hospital to prepare for any unusual symptoms.

Automatic fire suppression systems, including sprinklers, activated and extinguished the blaze within approximately 10 minutes. However, the fire caused a leak of chemicals, including fluorine gas, from a gas pipe cabinet within the room where employees were working. Eleven workers were exposed to the leaked substance and were transported to the internal hospital within the SK Hynix Cheongju campus for treatment.

SK Hynix reported that around five employees initially showed symptoms such as stinging eyes. After treatment, all were cleared as having no issues, though they are being kept at the hospital for observation as a precaution. Fluorine levels measured around 5ppm, but environmental purification equipment was deployed, and levels have since stabilized below standard limits. The company stated that production has not been impacted and investigations into the cause are ongoing.

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We are investigating the cause of the accident with the fire department and others. We plan to have employees return after stabilizing the air quality in the gas room and other areas, and we will also investigate the circumstances of the accident.

Fluorine is used in the etching process for semiconductor manufacturing, a critical step involving the use of corrosive chemicals to remove specific materials from wafers. The substance is considered a highly toxic pollutant, with wastewater treatment standards set at 3ppm. SK Hynix is collaborating with fire authorities to determine the cause of the incident and plans to allow employees to return once air quality is confirmed as stable. The company is also investigating the circumstances surrounding the event.

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There is no disruption to equipment operation or production.